WilliamAment
Marked 9 years 2 months ago
Source: http://electronics.wesrch.com/wiki-2318-450mm-materials
Large diameter wafers- 450mm silicon substrates, Thickness, mass.... About 1mm thick, and over a 3/4 of a pound of material! Substrate support, deflection in processing, flatness, warp and bow, slip/lineage.
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