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Epitaxial wafers are typically doped at concentrations strongly differing from that of the substrate. In addition, the dopant species may cause a lattice contraction, or a lattice expansion of the epitaxial layer relative to the substrate.

Source: http://electronics.wesrch.com/wiki-2319-epitaxial-wafers

Epitaxial wafers are typically doped at concentrations strongly differing from that of the substrate. In addition, the dopant species may cause a lattice contraction, or a lattice expansion of the epitaxial layer relative to the substrate.

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